Suss MA 6 Mask Aligner

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Suss MA 6 Mask Aligner

General Information

iLab Name: MA6

iLab Core: BRK Lithography Core

FIC: David Janes

Owner: Mike Courtney

Location: Cleanroom N Bay

Max Wafer Size: 6

System Information

General Description

The Karl Suss MA24 is a fully automatic production mask aligner designed for cassette-to-cassette operation. This tool is designed for the fabrication of whole 4" inch wafers only!

Capabilities

It is operated in contact mode on the bottom lamp only and proximity mode on the top lamp only. It can be used in single bottom exposure only or double top and bottom exposures simultaneously.

Materials Compatibility

Not Applicable

Notes

With the Suss MA 6 operated manually, all contact exposure programs (vacuum, hard, soft,contact and proximity) are provided to print features far into the submicron range. X and Y shift are below 0.1 micron and not detectable by optical means. Wafers up to 6 mm thickness may be processed.