Suss MA 24 Aligner

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Suss MA 24 Aligner

General Information

FIC: David Janes

Owner: Mike Courtney

Location: Cleanroom N Bay

Max Wafer Size: 4

System Information

General Description

The Karl Suss MA24 is a fully automatic production mask aligner designed for cassette-to-cassette operation. This tool is designed for the fabrication of whole 4" inch wafers only!

Capabilities

It is operated in contact mode on the bottom lamp only and proximity mode on the top lamp only. It can be used in single bottom exposure only or double top and bottom exposures simultaneously.

Materials Compatibility

Not Applicable

Notes

A manual mode is available in which wafers are loaded to the flat finder manually one at a time but all wafers must unload automatically to the unload cassette.