Electromask System

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Electromask System Electromask System

General Information

FIC: David Janes

Owner: Mike Courtney

Location: Cleanroom M Bay

System Information

General Description

The Platemaker is a combination Step-and-Repeat camera and Pattern Generator capable of exposing either chrome or iron oxide photomasks up to 8" by 10" in size. Jobs are to be submitted through our online Queue

Capabilities

Direct Write Light and Dark field masks with features 3 microns or larger, total design 0.25" smaller than glass size. Step and Repeat Light and Dark field masks with feature 1.5 microns and larger AND total die size less than 19,500x19,500 microns. Transparencies Convert transparencies to glass mask. Please contact staff for details and specifications.

Materials Compatibility

Not Applicable

Notes

Our goal is to deliver your plates within 5 working days of job approval date (not submission date). Jobs needed in less than two days are available only if time is permitting. Five day delivery does not apply to staff vacations or university holidays. Please plan accordingly. Data must meet the design requirements listed in: RULES Please Do NOT send us email when a new job has been submitted. We receive notification from the queue.