Tegal Corp. Plasmod Plasma Etcher

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Tegal Corp. Plasmod Plasma Etcher

General Information

FIC: Shared

Owner: Lisa Reece

Location: 2081

Max Wafer Size: 4

System Information

General Description

Bench-top plasma etcher for wafer fabrication - cleans organic residues and oxidizes surfaces

Capabilities

4" diameter chamber / uses room air for oxygen source

Materials Compatibility

Cleans organic residues and oxidizes surfaces