Critical point dryer (CPD)

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Critical point dryer (CPD)

General Information

iLab Name: CPD

iLab Core: BRK Packaging and Assembly Core

FIC: Dimitrios Peroulis

Owner: Justin Wirth

Location: Cleanroom P Bay

Max Wafer Size: 6

System Information

General Description

Wafer CPD MEMS Dryer

Capabilities

Ranges are from .25" to 6" wafer

Materials Compatibility

Not Applicable