PVD Sputterer #2

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General Information

iLab Name: PVD Sputtering Magnetics

iLab Core: BRK Evaporation/Sputtering Core

FIC: Joerg Appenzeller

Owner: Dave Lubelski

Location: Cleanroom Bay S

Max Wafer Size: 4

System Information

General Description

Magnetic sputtering system

Capabilities

DC/RF sputtering system, Base pressure of 5x10-6 torr, reactive sputering capable, Materials include: Ta, Ru, Mg, Cu, W, NiFe, CoFeB, Mo

Materials Compatibility

Ta, Ru, MgO, Cu, W, NiFe, PY, CoFeB