PVD Sputterer #1

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General Information

iLab Name: PVD Sputtering Metals Dielectrics

iLab Core: BRK Evaporation/Sputtering Core

FIC: Peter Bermel

Owner: Dave Lubelski

Location: Cleanroom Bay S

Max Wafer Size: 4

System Information

General Description

Metal/dielectric sputtering system

Capabilities

DC/RF sputtering capable, 2" targets, base pressure 5x10-6 torr, materials include: Si, Ge, Ag, Cu, Al, Ti, Ta, W, Aui, Nb, WSi4, TiO2, Si3N4, SiO2

Materials Compatibility

Au, Ti, Al, N, Al(1%Si), WSi4, TiO2, Al2O3, Si3N4