Nitride sputter system

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Nitride sputter system

General Information

iLab Name: Nitride Sputtering

iLab Core: BRK Evaporation/Sputtering Core

FIC: Vlad Shalaev

Owner: Dave Lubelski

Location: BRK 1217

Max Wafer Size: 2

System Information

General Description

Capabilities

Materials Compatibility

Not Applicable