Carbon Nanotube PECVD

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Carbon Nanotube PECVD

General Information

FIC: Tim Fisher

Owner: Dave Lubelski

Location: brk2283

Max Wafer Size: 2

System Information

General Description

Seki Techtron Diamond PECVD modified to grow carbon nanotubes.

Capabilities

Limited access, see PI

Materials Compatibility

Check with Tim Fisher