Oxide PLD system

Return to Equipment at Birck Nanotechnology Center

Oxide PLD system

General Information

iLab Name: PLD

iLab Core: BRK Evaporation/Sputtering Core

FIC: Alexandra Boltasseva

Owner: Justin Wirth

Location: BRK 1217

Max Wafer Size: 2

System Information

General Description

Versatile pulsed laser deposition system dedicated to oxides Manufacturer: PVD Products, Inc.

Capabilities

Materials Compatibility

Non-outgassing materials