Veeco Thermal Evaporator

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Veeco Thermal Evaporator

General Information

iLab Name: Veeco Thermal 1

iLab Core: BRK Evaporation/Sputtering Core

FIC: Minghao Qi

Owner: Dave Lubelski

Location: Cleanroom-Bay L

Max Wafer Size: 4

System Information

General Description

Capabilities

Materials include: Ti, Ni, Fe, Co, Al, Cu

Materials Compatibility

Ti, Ni, Fe, Al, Cu, PY