PVD E-Beam Evaporator

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PVD E-Beam Evaporator PVD E-Beam Evaporator

General Information

iLab Name: PVD 1

iLab Core: BRK Evaporation/Sputtering Core

FIC: Shared

Owner: Dave Lubelski

Location: Cleanroom-Bay K

System Information

General Description

Six Pocket E-Beam Evaporator used for Ferro-magnetic materials

Capabilities

Materials Compatibility

Fe, PY, Ti, Cu, Al, Ni, Co, Sc