Lesker E-Beam Evaporator

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Lesker E-Beam Evaporator

General Information

iLab Name: Lesker Ebeam

iLab Core: BRK Evaporation/Sputtering Core

FIC: Shared

Owner: Dave Lubelski

Location: Cleanroom-Bay K

Max Wafer Size: 6

System Information

General Description

Capabilities

Materials Compatibility

Ti, Au, Cr, Pt, Al, Ni, Mo, Pd