GLAD E-Beam Evaporator

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General Information

iLab Name: PVD GLAD

iLab Core: BRK Evaporation/Sputtering Core

FIC: Alexandra Boltasseva

Owner: Dave Lubelski

Location: Cleanroom Bay L

Max Wafer Size: 4

System Information

General Description

4-Pocket Electron Beam Evaporator

Capabilities

Large capacity 25cc crucibles, water cooled stage, capable of depositing +/-90 degrees, Materials allowed - Ag, SiO2, Ge, Base pressure of 2x10-8 torr

Materials Compatibility

Check with Prof. Shalaev