CHA E-beam Evaporator

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CHA E-beam Evaporator

General Information

iLab Name: CHA

iLab Core: BRK Evaporation/Sputtering Core

FIC: Minghao Qi

Owner: Kenny Schwartz

Location: Cleanroom-Bay K

Max Wafer Size: 4

System Information

General Description

Capabilities

Materials Compatibility

Source Materials: Ti, Au, Pt, Pd, Al, Ni, Ge, Cr, Ag