Easy Tube 3000 CVD

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General Information

iLab Name: EasyTube 3000

iLab Core: BRK Growth Core

FIC: Chen Yang

Owner: Joon Park

Location: BRK 2221

Max Wafer Size: 4

System Information

General Description

Graphene thermal and plasma deposition system.

Capabilities

Please see PI for sample approval.

Materials Compatibility

Si, Cu