Specialty Coating Systems 6800 Spin Coater

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Specialty Coating Systems 6800 Spin Coater

General Information

FIC: Shared

Owner: Mike Courtney

Location: 2031

Max Wafer Size: 4 in.

System Information

General Description

Spin Coater Series allows for the uniform application of photoresists, polyimides, metal-organics, dopants, silica films and most organic and aqueous solutions to planar substrates.

Capabilities

Materials Compatibility

Misc.