P-7 Profilometer

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P-7 Profilometer

General Information

iLab Name: P-7 Profilometer

iLab Core: BRK Metrology Core

FIC: Shared

Owner: Sean Rinehart

Location: Cleanroom Bay L

Max Wafer Size: 150mm

System Information

General Description

The KLA-Tencor P-7 Profiler measures step height, waviness and roughness of a surface.

Capabilities

Accommodates up to 150mm (6") substrates.  Measures vertical features ranging from the nanoscale to approximately 360 um.

Materials Compatibility

Small samples may need to be adhered to a carrier wafer for measurement.