Bruker GT-K1 Optical Profilometer

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General Information

iLab Name: Bruker GT-K

iLab Core: BRK Metrology Core

FIC: Shared

Owner: Sean Rinehart

Location: Cleanroom Bay P

Max Wafer Size: 6"

System Information

General Description

The Contour GT-K is a non-contact 3-dimension optical profiler that uses white light interferometric (WLI) hardware combined with 64-bit, multi-core operation and analysis software (Vision64™). It can be used to profile reflective surfaces (e.g. silicon and metals) and also thick (> 2µm) transparent films on a reflective surface like photoresists on a silicon substrate.

Capabilities

Optics:

Materials Compatibility

Not Applicable