Alpha-Step IQ

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Alpha-Step IQ

General Information

iLab Name: Alpha-Step

iLab Core: BRK Metrology Core

FIC: Shared

Owner: Sean Rinehart

Location: Cleanroom Bay L

Max Wafer Size: 8

System Information

General Description

The KLA-Tencor Alpha-Step IQ profiler measures step height, waviness and roughness of a surface.

Capabilities

Accommodates up to 150mm (6") substrate and 21mm (0.83") thick. Measurement of vertical features ranging from 100A to approximately 2mm. The horizontal resolution limited by the stylus radius.

Materials Compatibility

Not Applicable