Jeol Table Top SEM

Return to Equipment at Birck Nanotechnology Center

General Information

Owner: Bill Rowe

Location: Cleanroom

Max Wafer Size: 4

System Information

General Description

The JCM-5000 is an easy to use tabletop SEM. It is ideal for quick process checks.

Capabilities

The system can operate at 5kV, 10kV or 15kV. It has a high and low vacuum mode. It is capable for viewing substrates up to 40,000 magnification.

Materials Compatibility

Not Applicable