FEI Nova 200 NanoLab DualBeamTM-SEM/FIB

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FEI Nova 200 NanoLab DualBeamTM-SEM/FIB

General Information

iLab Name: FEI Nova 200 NanoLab DualBeamTM-SEM/FIB

iLab Core: BRK Electron Microscopy Core

FIC: Volkan Ortalan

Owner: Rosa Diaz

Location: BRK 1237

Max Wafer Size: 6

System Information

General Description

Combines ultra-high resolution field emission scanning electron microscopy (SEM) and precise focused ion beam (FIB) etch and Pt deposition.

Comprehensive beam chemistries for Pt deposition and etch, and automation enable creation of structures such as:

Equipped with Klocke Nanorobotics Manipulator

Materials Compatibility

Not Applicable