Probe Station I

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Probe Station I Probe Station I

General Information

iLab Name: Probe 1

iLab Core: BRK Characterization Core

FIC: Shared

Owner: Nithin Raghunathan

Location: BRK 2261

Max Wafer Size: 4

System Information

General Description

Probe Station I consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. The test equipment consists of an Keithley SCS4200 Semiconductor Parameter Analyzer, an HP 4284A LCR meter. A Windows-NT PC running Labview is used to drive the instruments and collect the data.

Materials Compatibility

Not Applicable